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Title
Japanese:発光分光計測による電子エネルギー分布関数診断にむけた低気圧マイクロ波放電アルゴンプラズマの励起状態分布の解析 
English:The excited-state distribution analysis of the low-pressure microwave discharge argon plasma for electron energy distribution function diagnosis by optical emission spectroscopic measurement 
Author
Japanese: 山下雄也, 赤塚 洋.  
English: Yuya Yamashita, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:第80回応用物理学会秋季学術講演会 講演予稿集 
English:Extended Abstracts of the 80th JSAP Autumn Meeting 2019 
Volume, Number, Page         p. 07-082
Published date Sept. 4, 2019 
Publisher
Japanese:公益社団法人 応用物理学会 
English:Japan Society of Appled Physics 
Conference name
Japanese:第80回応用物理学会秋季学術講演会 
English:The 80th JSAP Autumn Meeting 2019 
Conference site
Japanese:札幌 
English:Sapporo 
Official URL https://confit.atlas.jp/guide/event/jsap2019a/subject/20a-B11-2/entries
 
Abstract The EEDF diagnosis by optical emission spectroscopic measurement is required. In this study, we analyzed the electron energy distribution function (EEDF) dependence of the excited-state distribution. This study is focused on the 2.45GHz low-pressure microwave discharge argon plasma. We measured the EEDF by Langmuir probe based on Druyvesteyn´s method. We evaluated the equivalent electron temperature Te and electron density Ne. And, we analyzed the excited-state distribution based on collisional-radiative model. We evaluated under the EEDFs: the measured EEDF, Maxwellian and Druyvesteynian which had equivalent Te and Ne to the probe measurement values, respectively. We found that the levels between the level 3d´[3/2]o2+ [5/2]o2,3 the level 16´ (Racah symbol) were higher dependency then the other levels.

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