Publication Information

Title

Japanese:
English:	Resistivity Reduction of Low-Carrier-Density Sputtered-MoS2 Film using Fluorine Gas

Author

Japanese:	岡田泰典, 山口晋平, 大橋匠, 宗田伊理也, 角嶋邦之, 筒井一生, 若林整.
English:	Yasunori Okada, Shimpei Yamaguchi, Takumi Ohashi, Iriya Muneta, Kuniyuki Kakushima, Kazuo Tsutsui, Hitoshi Wakabayashi.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Workshop on Junction Technology

Conference site

Japanese:
English:	Kyoto

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