大面積集積化に向けたスパッタMoS2薄膜を用いたTop-Gate nMISFETs

Publication Information

Title

Japanese:	大面積集積化に向けたスパッタMoS2薄膜を用いたTop-Gate nMISFETs
English:

Author

Japanese:	松浦賢太朗, 清水淳一, 外山真矢人, 大橋匠, 宗田伊理也, 石原聖也, 角嶋邦之, 筒井一生, 小椋厚志, 若林整.
English:	Kenntarou Matsuura, Junichi Shimizu, Mayato Toyama, Takumi Ohashi, Iriya Muneta, 石原聖也, Kuniyuki KAKUSHIMA, KAZUO TSUTSUI, Atsushi Ogura, Hitoshi Wakabayashi.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 18, 2018

Publisher

Japanese:
English:

Conference name

Japanese:	第79回応用物理学会秋季学術講演会
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Conference site

Japanese:	名古屋
English: