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Publication Information
Title
Japanese:
大面積集積化に向けたスパッタ二次元半導体 MoS2 薄膜のTop-gate nMISFETs チャネル応用
English:
Author
Japanese:
松浦賢太朗
,
清水淳一
,
外山真矢人
,
大橋匠
,
坂本拓朗
,
宗田伊理也
, 石原聖也,
角嶋邦之
,
筒井一生
, 小椋厚志,
若林整
.
English:
Kenntarou Matsuura
,
Junnichi Shimizu
,
Mayato Toyama
,
Takumi Ohashi
,
Takuro Sakamoto
,
Iriya Muneta
, 石原聖也,
Kuniyuki KAKUSHIMA
,
KAZUO TSUTSUI
, 小椋厚志,
Hitoshi Wakabayashi
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Feb. 28, 2019
Publisher
Japanese:
English:
Conference name
Japanese:
応用物理学会シリコンテクノロジー分科会第216回研究集会
English:
Conference site
Japanese:
大阪
English:
©2007
Institute of Science Tokyo All rights reserved.