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Title
Japanese:二元同時スパッタリング法によるAl1-xScxN薄膜の作製と強誘電性評価 
English: 
Author
Japanese: 安岡慎之介, 清水荘雄, 上原雅人, 舟窪浩.  
English: Shinnosuke Yasuoka, Takao Shimizu, 上原雅人, HIROSHI FUNAKUBO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Jan. 9, 2020 
Publisher
Japanese: 
English: 
Conference name
Japanese:第58回セラミックス基礎科学討論会 
English: 
Conference site
Japanese:名古屋市 
English: 

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