Suppression of Sulfur Desorption of High-Temperature Sputtered MoS2 Film by Applying DC Bias

Publication Information

Title

Japanese:
English:	Suppression of Sulfur Desorption of High-Temperature Sputtered MoS2 Film by Applying DC Bias

Author

Japanese:	Y. Hibino, S. Ishihara, Y. Oyanagi, N. Sawamoto, 大橋匠, 松浦賢太朗, 若林整, A. Ogura.
English:	Y. Hibino, S. Ishihara, Y. Oyanagi, N. Sawamoto, T. Ohashi, K. Matsuura, H. Wakabayashi, A. Ogura.

Language

English

Journal/Book name

Japanese:
English:	ECS Transactions

Volume, Number, Page

vol. 85 no. 13 531

Published date

May 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: