Fabrication of WS2 Film by DC Bias Applied High-Temperature Sputtering

Publication Information

Title

Japanese:
English:	Fabrication of WS2 Film by DC Bias Applied High-Temperature Sputtering

Author

Japanese:	Y. Oyanagi, Y. Hibino, S. Ishihara, N. Sawamoto, 大橋匠, 松浦賢太朗, 若林整, A. Ogura.
English:	Y. Oyanagi, Y. Hibino, S. Ishihara, N. Sawamoto, T. Ohashi, K. Matsuura, H. Wakabayashi, A. Ogura.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	MRS Fall Meeting & Exhibit

Conference site

Japanese:
English: