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Title
Japanese: 
English:Developing an optimization algorithm for diagnostic modeling of optical emission spectroscopic measurement of non-equilibrium plasmas based on the argon collisional-radiative model 
Author
Japanese: 山下雄也, 秋葉拓也, 岩永敏秀, 山岡秀彦, 伊達秀一, 赤塚洋.  
English: Yuya Yamashita, Takuya Akiba, Toshihide Iwanaga, Hidehiko Yamaoka, Shuichi Date, Hiroshi Akatsuka.  
Language English 
Journal/Book name
Japanese: 
English:Japanese Journal of Applied Physics 
Volume, Number, Page Vol. 60        pp. 046003-1 - 046003-11
Published date Mar. 16, 2021 
Publisher
Japanese: 
English:IOP Science 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
Official URL https://iopscience.iop.org/article/10.35848/1347-4065/abe642
 
DOI https://doi.org/10.35848/1347-4065/abe642
Abstract In this work, an optimization algorithm was proposed for plasma diagnostic modeling based on a statistical analysis of reduced population density distribution. The algorithm generates a diagnostic equation, whose input parameters are the radiant flux of the multi-optical emission lines, and output parameters are electron temperature Te, electron density Ne, and electron energy distribution function (EEDF), based on the dependence of reduced population density on Te, Ne, and EEDF. The argon collisional-radiative model and the generalized EEDF were applied for the analysis of the excitation-kinetics. In this study, the diagnostic error for the low-pressure inductively coupled plasma (ICP), the low-pressure microwave discharge (MWD) surface wave plasma, and the atmospheric dielectric barrier discharge (DBD) plasma were simulated. The simulated diagnostic errors were smaller than those of the previously reported model.

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