Effects of deposition conditions on the ferroelectric properties of (Al1-xScx)N thin films

Publication Information

Title

Japanese:
English:	Effects of deposition conditions on the ferroelectric properties of (Al1-xScx)N thin films

Author

Japanese:	安岡慎之介, 清水荘雄, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yoshiomi Hiranaga, 長康雄, 舟窪浩.
English:	Shinnosuke Yasuoka, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yoshiomi Hiranaga, Yasuo Cho, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	J. Appl. Phys.

Volume, Number, Page

vol. 128 pp. 114103-1-11

Published date

Sept. 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI