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Title
Japanese:二次元スパッタリング法により作製した(Al1-xScx)N 薄膜の強誘電特性 
English: 
Author
Japanese: 安岡 慎之介, 清水 荘雄, 上原雅人, 山田浩志, 秋山守人, 舟窪 浩.  
English: 安岡慎之介, 清水荘雄, 上原雅人, 山田浩志, 秋山守人, 舟窪浩.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date May 27, 2020 
Publisher
Japanese: 
English: 
Conference name
Japanese:第37回強誘電体会議（FMA 37） 
English: 
Conference site
Japanese: 
English: 

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