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Title
Japanese:エッチング装置で生成したアルゴン低気圧誘導結合プラズマの発光分光計測による電子温度・電子密度・電子エネルギー分布関数診断 
English:Electron temperature, density, and energy distribution function diagnostics of the argon low pressure argon plasma generated by an etching unit based on optical emission spectroscopic measurement 
Author
Japanese: 山下 雄也, 秋葉 拓也, 岩永 敏秀, 伊達 修一, 山岡 英彦, 赤塚 洋.  
English: Yuya Yamashita, Takuya Akiba, Toshihide Iwanaga, Shuichi Date, Hidehiko Yamaoka, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:第82回応用物理学会秋季学術講演会 講演予稿集 
English:Extended Abstracts of the 82nd JSAP Autumn Meeting 2021 
Volume, Number, Page         07-002
Published date Aug. 26, 2021 
Publisher
Japanese:公益社団法人 応用物理学会 
English:The Japan Society of Applied Physics 
Conference name
Japanese:第82回応用物理学会秋季学術講演会 
English:The 82nd JSAP Autumn Meeting 2021 
Conference site
Japanese: 
English: 
Official URL https://confit.atlas.jp/guide/event/jsap2021a/subject/10a-S301-2/tables?cryptoId=
 
Abstract Electron temperature Te, density Ne, and energy distribution function (EEDF) of the argon low pressure inductively coupled plasma generated by an etching unit were diagnosed by optical emission spectroscopic measurement. In order to reduce diagnostic errors, the dependence of reduced population density distribution on Te, Ne, and EEDF was surveyed. The excitation levels which used for diagnosis were selected based on the survey result. The diagnosis was based on fitting reduced population densities with calculated value by collisional-radiative model and experimental value by OES measurement of emission lines which upper levels were 4p[1/2]1, 4p’[3/2]1, 4p[1/2]0, and 4p’[1/2]0.

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