Control of Ferroelectric Property in (Al1-xScx)N Films Prepared by Sputtering Method

Publication Information

Title

Japanese:
English:	Control of Ferroelectric Property in (Al1-xScx)N Films Prepared by Sputtering Method

Author

Japanese:	舟窪浩, 安岡慎之介, 水谷涼一, 白石貴久, 舘山明紀, 清水荘雄, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yoshiomi Hiranaga, 長康雄.
English:	Hiroshi Funakubo, Shinnosuke Yasuoka, Ryoichi Mizutani, Takahisa Shiraishi, Akinori Tateyama, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yoshiomi Hiranaga, Yasuo Cho.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 29, 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2021 MRS Fall Meeting & Exhibit

Conference site

Japanese:
English:	Boston, MA