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Title
Japanese:種々の電極を用いた(Al1-x,Scx)N薄膜の強誘電性評価 
English: 
Author
Japanese: 大田怜佳, 安岡慎之介, 水谷涼一, 白石貴久, 舟窪浩.  
English: Reika Ota, Shinnosuke Yasuoka, Ryoichi Mizutani, Takahisa Shiraishi, HIROSHI FUNAKUBO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 22, 2022 
Publisher
Japanese: 
English: 
Conference name
Japanese:第69回応用物理学会春季学術講演会 
English: 
Conference site
Japanese:相模原市 
English: 

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