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Title
Japanese: 
English:Diagnosis of argon inductively coupled plasma by optical emission spectroscopic measurement with compensation of spectral reflectance on chamber inner wall 
Author
Japanese: 山下雄也, 土居謙太, 清田哲司, 細谷宗太郎, 根津篤, 赤塚洋.  
English: Yuya Yamashita, Kenta Doi, Tetsuji Kiyota, Sotaro Hosoya, Atsushi Nezu, Hiroshi Akatsuka.  
Language English 
Journal/Book name
Japanese: 
English:Proc. 43rd International Symposium on Dry Process (DPS2022) 
Volume, Number, Page         pp. 47-48
Published date Nov. 24, 2022 
Publisher
Japanese: 
English:Program Committee of 43rd International Symposium on Dry Process (DPS2022) 
Conference name
Japanese: 
English:43rd International Symposium on Dry Process (DPS2022) 
Conference site
Japanese:大阪 
English:Osaka 
Official URL http://www.dry-process.org/2022/poster_program.html
 
Abstract A simple method to measure the spectral reflectance of the chamber inner wall was proposed for optical emission spectroscopic (OES) measurement of inductively coupled plasma. By applying the spectral radiance compensation based on the measured spectral reflectance, the electron temperature and density obtained by OES measurement were in trend agreeing with probe measurement results.

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