Diagnosis of Spatial Distribution of Electron Temperature and Electron Density of Argon Inductively Coupled Plasma by Tomographic Optical Emission Spectroscopic Measurement
In recent years, tomography-based diagnostics have been reported. However, no reports have considered atomic-molecular processes in detail, and the significant uncertainty was caused by excitation-kinetic analysis. In this study, argon inductively coupled plasma by tomographic optical emission spectroscopic measurement. The excitation-kinetics analysis was based on the collisional radiation model, one of the atomic-molecular process models which can describe atomic-molecular processes in detail. A quantitative diagnosis of the spatial distribution of electron temperature and electron density has been produced.