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Title
Japanese:トモグラフィック発光分光計測によるアルゴン誘導結合プラズマの電子温度・電子密度の空間分布診断 
English:Diagnosis of Spatial Distribution of Electron Temperature and Electron Density of Argon Inductively Coupled Plasma by Tomographic Optical Emission Spectroscopic Measurement 
Author
Japanese: 山下 雄也, 土居 謙太, 清田 哲司, 浅川 慶一郎, 細谷 宗太郎, 菊地 航行, 根津 篤, 赤塚 洋.  
English: Yuya Yamashita, Kenta Doi, Tetsuji Kiyota, Keiichiro Asakawa, Sotaro Hosoya, Wataru Kikuchi, Atsushi Nezu, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:2023年第70回応用物理学会春季学術講演会 講演予稿集 
English:Extended abstracts of the 70th JSAP Spring Meeting 2023 
Volume, Number, Page         07-007
Published date Feb. 27, 2023 
Publisher
Japanese:公益社団法人 応用物理学会 
English:The Japan Society of Applied Physcs 
Conference name
Japanese:2023年第70回応用物理学会春季学術講演会 
English:The 70th JSAP Spring Meeting 2023 
Conference site
Japanese:東京 
English:Tokyo 
Official URL https://confit.atlas.jp/guide/event/jsap2023s/subject/15p-B309-6/tables?cryptoId=
 
Abstract In recent years, tomography-based diagnostics have been reported. However, no reports have considered atomic-molecular processes in detail, and the significant uncertainty was caused by excitation-kinetic analysis. In this study, argon inductively coupled plasma by tomographic optical emission spectroscopic measurement. The excitation-kinetics analysis was based on the collisional radiation model, one of the atomic-molecular process models which can describe atomic-molecular processes in detail. A quantitative diagnosis of the spatial distribution of electron temperature and electron density has been produced.
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