Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films

Publication Information

Title

Japanese:
English:	Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films

Author

Japanese:	安岡慎之介, 水谷涼一, 大田怜佳, 白石貴久, 清水荘雄, 安井伸太郎, 江原祥隆, 西田謙, Masato UEHARA, Hiroshi YAMADA, Morito AKIYAMA, Yasuhiko IMAI, 坂田修身, 舟窪浩.
English:	Shinnosuke YASUOKA, Ryoichi MIZUTANI, Reika OTA, Takahisa SHIRAISHI, Takao SHIMIZU, Shintaro YASUI, Yoshitaka EHARA, Ken NISHIDA, Masato UEHARA, Hiroshi YAMADA, Morito AKIYAMA, Yasuhiko IMAI, Osami SAKATA, Hiroshi FUNAKUBO.

Language

English

Journal/Book name

Japanese:
English:	J. Ceram. Soc. Jpn.

Volume, Number, Page

Vol. 130 No. 7 pp. 436-441

Published date

July 1, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: