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Title
Japanese: 
English:Estimation of atmospheric-pressure non-equilibrium Ar plasma EEDF using optical emission spectroscopy and linear combination of generalized EEDF 
Author
Japanese: 菊地航行, 榎本純, 山下航平, 山下雄也, 根津篤, 赤塚洋.  
English: Wataru Kikuchi, Jun Enomoto, Kohei Yamashita, Yuya Yamashita, Atsushi Nezu, Hiroshi Akatsuka.  
Language English 
Journal/Book name
Japanese: 
English:Proceedings of 25th International Symposium on Plasma Chemistry (ISPC25) 
Volume, Number, Page        
Published date May 21, 2023 
Publisher
Japanese: 
English:International Organizing Committee of ISPC25 
Conference name
Japanese: 
English:25th International Symposium on Plasma Chemistry (ISPC25) 
Conference site
Japanese:京都 
English:Kyoto 
Official URL https://www.ispc25.com/index.html
 
Abstract Using optical emission spectroscopy (OES) measurement and global optimal search methods, the electron energy distribution function (EEDF), electron temperature T_e, and density N_e of dielectric barrier discharge (DBD) atmospheric-pressure non-equilibrium plasma (APNEP) are measured. Continuum emission due to bremsstrahlung is observed to the analysis with the spectrometric system in the visible wavelength range calibrated absolutely. Experimental results are compared with the theoretical spectra determined by linear combination of generalized EEDF in entire measurable range. The methodology to find the best theoretical fitting to obtain the plasma parameters is discussed with global optimization mathematics. It is found that T_e ~ 1.9 – 1.5 [eV] and 0.33 – 0.52 [eV], and the general EEDF parameter γ ~ 11 – 5 and 1 – 2.75 in high- and low- energy regions, respectively, as discharge voltage increases. N_e is confirmed to be approximately (0.63 - 5.3) × 10^{13}[cm^{-3}].

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