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Title
Japanese: 
English:Diagnosis of spatial distribution of electron temperature and electron density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement 
Author
Japanese: 山下 雄也, Kenta Doi, Tetsuji Kiyota, Keiichiro Asakawa, 細谷 宗太郎, 菊地 航行, 根津 篤, 赤塚 洋.  
English: Yuya Yamashita, Kenta Doi, Tetsuji Kiyota, Keiichiro Asakawa, Sotaro Hosoya, Wataru Kikuchi, Atsushi Nezu, Hiroshi Akatsuka.  
Language English 
Journal/Book name
Japanese: 
English:Program-book-abstracts of ICPIG XXXV 
Volume, Number, Page         p. 240
Published date July 9, 2023 
Publisher
Japanese: 
English:International Scientific Committee of 35th International Conference on Phenomena in Ionized Gases 
Conference name
Japanese: 
English:35th International Conference on Phenomena in Ionized Gases (ICPIG XXXV) 
Conference site
Japanese:エグモント・アン・ジー 
English:Egmond aan Zee 
Official URL https://www.icpig2023.com/home
 
Abstract Argon inductively coupled plasma was diagnosed by tomographic optical emission spectroscopy. Tomographic spectra were analyzed based on the collisional-radiation model to obtain the dependence of electron temperature and density on spatial positions. The dependence of those spatially-resolved plasma parameters upon radio-frequency power and gas pressure is discussed by contrasting experimental and electromagnetic field analysis results.

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