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Title
Japanese: 
English:Spatial distribution of vibrational and rotational temperatures of N2 ICP by tomographic optical emission spectroscopic measurement 
Author
Japanese: 米田 和真, 山下 雄也, K. Doi, T. Kiyota, K. Asakawa, 石 健太, 根津 篤, 赤塚 洋.  
English: K. Yoneda, Y. Yamashita, K. Doi, T. Kiyota, K. Asakawa, K. Ishi, A. Nezu, H. Akatsuka.  
Language English 
Journal/Book name
Japanese: 
English:Program-book-abstracts of ICPIG XXXV 
Volume, Number, Page         p. 285
Published date 2023 
Publisher
Japanese: 
English:International Scientific Committee of 35th International Conference on Phenomena in Ionized Gases 
Conference name
Japanese: 
English:35th International Conference on Phenomena in Ionized Gases (ICPIG XXXV) 
Conference site
Japanese:エグモント・アン・ジー 
English:Egmond aan Zee 
Official URL https://www.icpig2023.com/home
 
Abstract Nitrogen inductively coupled plasma of its discharge pressure of ∼ 1 Pa was measured by tomo- graphic optical emission spectroscopy to understand the spatial distribution of vibrational and rotational temperatures. The spatial distribution of vibrational and rotational temperatures of N2 and N+2 were diagnosed by spectral fitting.

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