メモリ応用に向けた(Al, Sc)N膜の薄膜化の検討

Publication Information

Title

Japanese:	メモリ応用に向けた(Al, Sc)N膜の薄膜化の検討
English:

Author

Japanese:	安岡慎之介, 大田怜佳, 岡本一輝, 石濱圭佑, 清水荘雄, 角嶋邦之, 上原雅人, 山田浩志, 秋山守人, 小金澤智之, L. S. R. Kumara, Okkyun Seo, 坂田修身, 舟窪浩.
English:	Shinnosuke Yasuoka, Reika Ota, Kazuki Okamoto, Keisuke Ishihama, Shimizu Takao, Kuniyuki KAKUSHIMA, 上原雅人, 山田浩志, 秋山守人, 小金澤智之, L. S. R. Kumara, Okkyun Seo, O. Sakata, HIROSHI FUNAKUBO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 20, 2022

Publisher

Japanese:
English:

Conference name

Japanese:	第83回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	仙台
English: