水素ガス熱処理が(Al,Sc)N 薄膜の強誘電特性へ及ぼす影響

Publication Information

Title

Japanese:	水素ガス熱処理が(Al,Sc)N 薄膜の強誘電特性へ及ぼす影響
English:

Author

Japanese:	岡本一輝, 安岡慎之介, 大田怜佳, 舟窪浩, 松井尚子, 入澤寿和, 恒川孝二.
English:	Kazuki Okamoto, Shinnosuke Yasuoka, Reika Ota, HIROSHI FUNAKUBO, 松井尚子, 入澤寿和, 恒川孝二.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 20, 2022

Publisher

Japanese:
English:

Conference name

Japanese:	第83回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	仙台
English: