様々な基板上におけるY:HfO2エピタキシャル膜の合成と評価

Publication Information

Title

Japanese:	様々な基板上におけるY:HfO2エピタキシャル膜の合成と評価
English:

Author

Japanese:	前川芳輝, 平井浩司, 安岡慎之介, 岡本一輝, 清水荘雄, 舟窪浩.
English:	Yoshiki Maekawa, Koji Hirai, Shinnosuke Yasuoka, Kazuki Okamoto, Shimizu Takao, HIROSHI FUNAKUBO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 15, 2023

Publisher

Japanese:
English:

Conference name

Japanese:	第70回応用物理学会春季学術講演会
English:

Conference site

Japanese:	東京
English: