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Title
Japanese:NbN電極上に作製したエピタキシャル(Al, Sc)N膜の電気特性評価 
English: 
Author
Japanese: 安岡慎之介, 大田怜佳, 岡本一輝, 清水荘雄, 舟窪浩.  
English: Shinnosuke Yasuoka, Reika Ota, Kazuki Okamoto, Shimizu Takao, HIROSHI FUNAKUBO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 15, 2023 
Publisher
Japanese: 
English: 
Conference name
Japanese:第70回応用物理学会春季学術講演会 
English: 
Conference site
Japanese:東京 
English: 

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