Home >

news Help

Publication Information


Title
Japanese: 
English:Radial dependence diagnosis of inductively coupled Ar plasma based upon optical emission spectroscopic measurement with spectral reflectance compensation 
Author
Japanese: 山下 雄也, 土居 謙太, 清田 哲司, 浅川 圭一郎, 細谷 宗太郎, 菊地 航行, 根津 篤, 赤塚 洋.  
English: Yuya Yamashita, Kenta Doi, Tetsuji Kiyota, Keiichiro Asakawa, Sotaro Hosoya, Wataru Kikuchi, Atsushi Nezu, Hiroshi Akatsuka.  
Language English 
Journal/Book name
Japanese: 
English:Review of Scientific Instruments 
Volume, Number, Page Vol. 94    Issue 8    083503
Published date Aug. 9, 2023 
Publisher
Japanese: 
English:AIP Publishing 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
Official URL https://pubs.aip.org/aip/rsi/article/94/8/083503/2906275/Radial-dependence-diagnosis-of-inductively-coupled
 
DOI https://doi.org/10.1063/5.0138912
Abstract This study proposed a simple method to evaluate the spectral reflectance of the inner wall of a vacuum chamber. A method for calculating spectral emission coefficients by taking the spectral reflectance of the chamber inner wall into account was proposed. Furthermore, plasma diagnosis based on optical emission spectroscopic (OES) measurement was performed so as to obtain radial dependence of electron temperature Te and density Ne of a radio frequency inductively coupled Argon (Ar) plasma by applying a collisional-radiative model to radially resolved emission spectra of the Ar plasma assuming axial symmetry. In addition, Langmuir probe measurement and electromagnetic simulation were performed and compared with the OES-based plasma diagnosis results. The spectral radiance compensation improved the diagnostic result by 0.6% and 3.1% for Te and Ne, respectively.

©2007 Tokyo Institute of Technology All rights reserved.