Thickness Scaling and Low Voltage Operation of Ferroelectric (Al1-xScx)N Films Prepared by Sputtering Method

Publication Information

Title

Japanese:
English:	Thickness Scaling and Low Voltage Operation of Ferroelectric (Al1-xScx)N Films Prepared by Sputtering Method

Author

Japanese:	舟窪浩, 安岡慎之介, 水谷涼一, 白石貴久, 舘山明紀, 大田怜佳, 岡本一輝, 清水荘雄, Masato Uehara, Hiroshi Yamada, Morito Akiyama.
English:	Hiroshi Funakubo, Shinnosuke Yasuoka, Ryoichi Mizutani, Takahisa Shiraishi, Akinori Tateyama, Reika Ota, Kazuki Okamoto, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 27, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2022 MRS Fall Meeting & Exhibit

Conference site

Japanese:
English:	Boston, MA