Japanese
Home
Search
Horizontal Search
Publication Search
( Advanced Search )
Patent Search
( Advanced Search )
Research Highlight Search
( Advanced Search )
Researcher Search
Search by Organization
Support
FAQ
T2R2 User Registration
Doctoral thesis registration
Support/Contact
About T2R2
What's T2R2?
Operation Guidance
Leaflets
About file disclosure
Related Links
Tokyo Tech
STAR Search
NII IR Program
Home
>
Help
Publication Information
Title
Japanese:
English:
Thickness Scaling and Low Voltage Operation of Ferroelectric (Al1-xScx)N Films Prepared by Sputtering Method
Author
Japanese:
舟窪 浩
,
安岡 慎之介
,
水谷 涼一
,
白石 貴久
,
舘山 明紀
,
大田 怜佳
,
岡本 一輝
,
清水 荘雄
, Masato Uehara, Hiroshi Yamada, Morito Akiyama.
English:
Hiroshi Funakubo
,
Shinnosuke Yasuoka
,
Ryoichi Mizutani
,
Takahisa Shiraishi
,
Akinori Tateyama
,
Reika Ota
,
Kazuki Okamoto
,
Takao Shimizu
, Masato Uehara, Hiroshi Yamada, Morito Akiyama.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Nov. 27, 2022
Publisher
Japanese:
English:
Conference name
Japanese:
English:
2022 MRS Fall Meeting & Exhibit
Conference site
Japanese:
English:
Boston, MA
©2007
Tokyo Institute of Technology All rights reserved.