Sc添加GaＮ薄膜の強誘電性へのSc濃度と温度の影響

Publication Information

Title

Japanese:	Sc添加GaＮ薄膜の強誘電性へのSc濃度と温度の影響
English:

Author

Japanese:	上原雅人, 水谷涼一, 安岡慎之介, 清水荘雄, 山田浩志, 秋山守人, 舟窪浩.
English:	上原雅人, Ryoichi Mizutani, Shinnosuke Yasuoka, Shimizu Takao, 山田浩志, 秋山守人, HIROSHI FUNAKUBO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 20, 2022

Publisher

Japanese:
English:

Conference name

Japanese:	第83回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	仙台市
English: