種々の組成の(Al, Sc)N多層膜のスイッチング特性評価

Publication Information

Title

Japanese:	種々の組成の(Al, Sc)N多層膜のスイッチング特性評価
English:

Author

Japanese:	安岡慎之介, 岡本一輝, 清水荘雄, 松井尚子, 入澤寿和, 恒川孝二, 舟窪浩.
English:	Shinnosuke Yasuoka, Kazuki Okamoto, Shimizu Takao, 松井尚子, 入澤寿和, 恒川孝二, HIROSHI FUNAKUBO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 19, 2023

Publisher

Japanese:
English:

Conference name

Japanese:	第84回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	熊本
English: