Accumulation-Mode積層型ナノワイヤCMOSデバイスのチャネル不純物濃度およびゲート電極仕事関数の依存性

Publication Information

Title

Japanese:	Accumulation-Mode積層型ナノワイヤCMOSデバイスのチャネル不純物濃度およびゲート電極仕事関数の依存性
English:

Author

Japanese:	安重英祐, 大橋匠, 宗田伊理也, 角嶋邦之, 筒井一生, 若林整.
English:	Eisuke Anju, Takumi Ohashi, Iriya Muneta, Kuniyuki KAKUSHIMA, KAZUO TSUTSUI, Hitoshi Wakabayashi.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 14, 2016

Publisher

Japanese:
English:

Conference name

Japanese:	第77回応用物理学会秋季学術講演会
English:	77th JSAP Autumnmeeting

Conference site

Japanese:	新潟
English:	Niigata