スパッタの低パワー化によるMoS2薄膜のキャリヤ濃度低減

Publication Information

Title

Japanese:	スパッタの低パワー化によるMoS2薄膜のキャリヤ濃度低減
English:

Author

Japanese:	坂本拓朗, 大橋匠, 松浦賢太朗, 宗田伊理也, 角嶋邦之, 筒井一生, 若林整.
English:	Takuro Sakamoto, Takumi Ohashi, Kentaro Matsuura, Iriya Muneta, Kuniyuki KAKUSHIMA, KAZUO TSUTSUI, Hitoshi Wakabayashi.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 20, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:	東京
English:	Tokyo