Ferroelectricity of 20-nm Thick (Al0.8Sc0.2)N Thin Films with TiN Electrodes

Publication Information

Title

Japanese:
English:	Ferroelectricity of 20-nm Thick (Al0.8Sc0.2)N Thin Films with TiN Electrodes

Author

Japanese:	大田怜佳, 安岡慎之介, 水谷涼一, 白石貴久, 角嶋邦之, 舟窪浩.
English:	Reika Ota, Shinnosuke Yasuoka, Ryoichi Mizutani, Takahisa Shiraishi, Kuniyuki Kakushima, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 13, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2022 U.S.-Japan Seminar on Dielectric and Piezoelectric Ceramics

Conference site

Japanese:
English:	Charleston, SC