Ti/Au 積層電気金めっき錘の反り変形の熱処理温度依存性評価

Publication Information

Title

Japanese:	Ti/Au 積層電気金めっき錘の反り変形の熱処理温度依存性評価
English:	Evaluation of the Effects of Heat Treatment Temperature on Warpage Deformation of the Ti/Au Multi-layered Electrodeposited-Au Proof Mass

Author

Japanese:	森達彦, 栗岡智行, Chen Chun-Yi, Chang Tso-Fu Mark, 町田克之, 伊藤浩之, 三宅美博, 曽根正人.
English:	Tatsuhiko Mori, Tomoyuki Kurioka, Chun Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.

Language

Japanese

Journal/Book name

Japanese:
English:	Proc. The 71st JSAP Spring MeetinProc.

Volume, Number, Page

p. 23a-12K-2

Published date

Mar. 22, 2024

Publisher

Japanese:
English:

Conference name

Japanese:	第71回応用物理学会春季学術講演会
English:	The 71st JSAP Spring Meeting 2024

Conference site

Japanese:
English: