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Publication List - Tatsuhiko Mori (5 / 8 entries)
Journal Paper
International Conference (Reviewed)
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Masako Okumura,
Tomoyuki Kurioka,
Torauto Yamada,
Tatsuhiko Mori,
Tso-Fu Mark Chang,
Yoshihiro Miyake,
Hiroyuki Ito,
Masato Sone,
Katsuyuki Machida.
Warpage Suppression and Device Characteristics of Gold Single-Axis Circular Proof-mass MEMS Capacitive Accelerometer Authors Information,
International Microprocesses and Nanotechnology Conference (MNC 2025),
Nov. 2025.
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Tatsuhiko Mori,
Tomoyuki Kurioka,
Shunkai Watanabe,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Effects of Annealing on Effective Young’s Modulus of Ti/Au Multi-layered Micro-Cantilevers for MEMS Capacitive Accelerometers,
MNE2025 Southampton,
MNE2025 Southampton,
Sept. 2025.
Domestic Conference (Reviewed)
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奥村 雅子,
Tomoyuki Kurioka,
Tatsuhiko Mori,
Torauto Yamada,
向出 隼人,
Chun Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
静電容量型MEMS加速度センサにおける金錘の形状による反り抑制の検討,
第17回集積化MEMSシンポジウム,
Oct. 2025.
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Tatsuhiko Mori,
Tomoyuki Kurioka,
Shunkai Watanabe,
Chun Yi Chen,
Tso-Fu Mark Chang,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
静電容量型MEMS加速度センサに向けたTi/Au積層マイクロカンチレバーの実効ヤング率に対するアニーリングの影響評価,
第17回集積化MEMSシンポジウム,
Oct. 2025.
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