Journal Paper

• Tatsuhiko Mori, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Miyake, Masato Sone. Evaluation of the Annealing Induced Warpage of an Electrodeposited-Au Octagonal Proof Mass with a Ti/Au Multi-layered Structure toward MEMS Capacitive Accelerometers, Journal of The Electrochemical Society, Oct. 2025.  Official location  

International Conference (Reviewed)

• Masako Okumura, Tomoyuki Kurioka, Torauto Yamada, Tatsuhiko Mori, Tso-Fu Mark Chang, Yoshihiro Miyake, Hiroyuki Ito, Masato Sone, Katsuyuki Machida. Warpage Suppression and Device Characteristics of Gold Single-Axis Circular Proof-mass MEMS Capacitive Accelerometer Authors Information, International Microprocesses and Nanotechnology Conference (MNC 2025), Nov. 2025.
• Tatsuhiko Mori, Tomoyuki Kurioka, Shunkai Watanabe, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Effects of Annealing on Effective Young’s Modulus of Ti/Au Multi-layered Micro-Cantilevers for MEMS Capacitive Accelerometers, MNE2025 Southampton, MNE2025 Southampton, Sept. 2025.

Domestic Conference (Reviewed)

• 奥村 雅子, Tomoyuki Kurioka, Tatsuhiko Mori, Torauto Yamada, 向出 隼人, Chun Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. 静電容量型MEMS加速度センサにおける金錘の形状による反り抑制の検討, 第17回集積化MEMSシンポジウム, Oct. 2025.
• Tatsuhiko Mori, Tomoyuki Kurioka, Shunkai Watanabe, Chun Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. 静電容量型MEMS加速度センサに向けたTi/Au積層マイクロカンチレバーの実効ヤング率に対するアニーリングの影響評価, 第17回集積化MEMSシンポジウム, Oct. 2025.

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