Journal Paper

• Masako Okumura, Tomoyuki Kurioka, Torauto Yamada, Tatsuhiko Mori, Katsuyuki Machida, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Single-axis gold micro-electro-mechanical-systems capacitive accelerometer with circular proof-mass for suppressing warpage, Japanese Journal of Applied Physics, Feb. 2026.  Official location  

Domestic Conference (Reviewed)

• Torauto Yamada, Chihaya Mukaide, Tomoyuki Kurioka, Katsuyuki Machida, Chun Yi Chen, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. 長期振動試験によるAu錘1軸MEMS加速度センサの耐久性評価, 第73回応用物理学会春季学術講演会, 第73回応用物理学会春季学術講演会, Mar. 2026.
• Chihaya Mukaide, Torauto Yamada, Tomoyuki Kurioka, Katsuyuki Machida, Chun Yi Chen, Tso-Fu Mark Chang, Yoshihiro Miyake, Masato Sone, Hiroyuki Ito. ワイドレンジAu錘1軸MEMS加速度センサにおける検出範囲の検討, 第73回応用物理学会春季学術講演会, 第73回応用物理学会春季学術講演会, Mar. 2026.
• Hisashi Takahata, Tomoyuki Kurioka, Torauto Yamada, Chihaya Mukaide, Katsuyuki Machida, Chun Yi Chen, Tso-Fu Mark Chang, Yoshihiro Miyake, Hiroyuki Ito, Masato Sone. Ti/Au積層九十九折ばねのばね定数に対するTi/Au膜厚の影響評価, 第73回応用物理学会春季学術講演会, 第73回応用物理学会春季学術講演会, Mar. 2026.
• Masako Okumura, Tomoyuki Kurioka, Torauto Yamada, Tatsuhiko Mori, Chihaya Mukaide, Chun Yi Chen, Tso-Fu Mark Chang, Yoshihiro Miyake, Hiroyuki Ito, Katsuyuki Machida, Masato Sone. 円形金錘1軸静電容量型MEMS加速度センサの構造とデバイス特性評価, 第73回応用物理学会春季学術講演会, 第73回応用物理学会春季学術講演会, Mar. 2026.

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