Journal Paper

• Devi Srujana Tenneti, Chihaya Mukaide, Kisuke Miyado, Torauto Yamada, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. Design and Evaluation of a Dual Detection Range Single-Axis MEMS Capacitive Accelerometer with Gold Proof-Mass Structure for Suppressed Warpage, Japanese Journal of Applied Physics, Vol. 64, p. 04SP20, Apr. 2025.  Official location  

International Conference (Reviewed)

• Masako Okumura, Tomoyuki Kurioka, Torauto Yamada, Tatsuhiko Mori, Tso-Fu Mark Chang, Yoshihiro Miyake, Hiroyuki Ito, Masato Sone, Katsuyuki Machida. Warpage Suppression and Device Characteristics of Gold Single-Axis Circular Proof-mass MEMS Capacitive Accelerometer Authors Information, International Microprocesses and Nanotechnology Conference (MNC 2025), Nov. 2025.

Domestic Conference (Reviewed)

• Hisashi Takahata, Tomoyuki Kurioka, Torauto Yamada, Katsuyuki Machida, Tso-Fu Mark Chang, Yoshihiro Miyake, Hiroyuki Ito, Masato Sone. Ti/Auで形成した九十九折ばねにおけるTi膜のばね形状への影響に関する検討, 第17回集積化MEMSシンポジウム, Nov. 2025.
• 奥村 雅子, Tomoyuki Kurioka, Tatsuhiko Mori, Torauto Yamada, 向出 隼人, Chun Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. 静電容量型MEMS加速度センサにおける金錘の形状による反り抑制の検討, 第17回集積化MEMSシンポジウム, Oct. 2025.

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