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Publication List - Torauto Yamada (10 / 16 entries)
Journal Paper
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Masako Okumura,
Tomoyuki Kurioka,
Torauto Yamada,
Tatsuhiko Mori,
Katsuyuki Machida,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Single-axis gold micro-electro-mechanical-systems capacitive accelerometer with circular proof-mass for suppressing warpage,
Japanese Journal of Applied Physics,
Vol. 65,
Number 5,
Mar. 2026.
Official location
International Conference (Reviewed)
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Hisashi Takahata,
Tomoyuki Kurioka,
Torauto Yamada,
Chihaya Mukaide,
Katsuyuki Machida,
Gen Hikosaka,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Yoshihiro Miyake,
Hiroyuki Ito,
Masato Sone.
Geometric Effects on the Mechanical Characteristics of Ti/Au Multi-layered Serpentine Springs toward MEMS Applications,
The 52nd International Conference on Micro and Nano Engineering (MNE2026 Interlaken),
Sept. 2026.
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Torauto Yamada,
Chihaya Mukaide,
Tomoyuki Kurioka,
Katsuyuki Machida,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Yoshihiro Miyake,
Masato Sone,
Hiroyuki Ito.
Miniaturization of High-Sensitivity Gold Single-axis MEMS Accelerometer by Adjusting Spring Constant and Hole Size of Perforated Proof-mass,
APCOT 2026,
APCOT 2026,
June 2026.
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Chihaya Mukaide,
Torauto Yamada,
Tomoyuki Kurioka,
Katsuyuki Machida,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Yoshihiro Miyake,
Masato Sone,
Hiroyuki Ito.
Detection Characteristics in Wide Range Gold Proof-Mass Single-Axis MEMS Capacitive Accelerometer and Its Application,
APCOT 2026,
APCOT 2026,
June 2026.
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Hisashi Takahata,
Tomoyuki Kurioka,
Torauto Yamada,
Chihaya Mukaide,
Katsuyuki Machida,
Chang Tso-Fu Mark,
Chen Chun-Yi,
Yoshihiro Miyake,
Hiroyuki Ito,
Masato Sone.
Analytical Modeling of Serpentine Spring for Gold Proof-mass Single-axis MEMS Accelerometer,
APCOT 2026,
APCOT 2026,
June 2026.
-
Torauto Yamada,
Chihaya Mukaide,
Hisashi Takahata,
Tomoyuki Kurioka,
Katsuyuki Machida,
Tso-Fu Mark Chang,
Yoshihiro Miyake,
Masato Sone,
Hiroyuki Ito.
A Highly Sensitive Single-Axis Gold MEMS Capacitive Accelerometer Improved with Spring and Proof-Mass Structures,
IEEE INERTIAL 2026, The 13th IEEE International Symposium on Inertial Sensors & Systems,
IEEE INERTIAL 2026, The 13th IEEE International Symposium on Inertial Sensors & Systems,
May 2026.
Domestic Conference (Reviewed)
-
Masako Okumura,
Tomoyuki Kurioka,
Torauto Yamada,
Tatsuhiko Mori,
Chihaya Mukaide,
Chun Yi Chen,
Tso-Fu Mark Chang,
Yoshihiro Miyake,
Hiroyuki Ito,
Katsuyuki Machida,
Masato Sone.
円形金錘1軸静電容量型MEMS加速度センサの構造とデバイス特性評価,
第73回応用物理学会春季学術講演会,
第73回応用物理学会春季学術講演会,
Mar. 2026.
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Torauto Yamada,
Chihaya Mukaide,
Tomoyuki Kurioka,
Katsuyuki Machida,
Chun Yi Chen,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake,
Hiroyuki Ito.
長期振動試験によるAu錘1軸MEMS加速度センサの耐久性評価,
第73回応用物理学会春季学術講演会,
第73回応用物理学会春季学術講演会,
Mar. 2026.
-
Chihaya Mukaide,
Torauto Yamada,
Tomoyuki Kurioka,
Katsuyuki Machida,
Chun Yi Chen,
Tso-Fu Mark Chang,
Yoshihiro Miyake,
Masato Sone,
Hiroyuki Ito.
ワイドレンジAu錘1軸MEMS加速度センサにおける検出範囲の検討,
第73回応用物理学会春季学術講演会,
第73回応用物理学会春季学術講演会,
Mar. 2026.
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Hisashi Takahata,
Tomoyuki Kurioka,
Torauto Yamada,
Chihaya Mukaide,
Katsuyuki Machida,
Chun Yi Chen,
Tso-Fu Mark Chang,
Yoshihiro Miyake,
Hiroyuki Ito,
Masato Sone.
Ti/Au積層九十九折ばねのばね定数に対するTi/Au膜厚の影響評価,
第73回応用物理学会春季学術講演会,
第73回応用物理学会春季学術講演会,
Mar. 2026.
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