Miniaturization of High-Sensitivity Gold Single-axis MEMS Accelerometer by Adjusting Spring Constant and Hole Size of Perforated Proof-mass

Publication Information

Title

Japanese:
English:	Miniaturization of High-Sensitivity Gold Single-axis MEMS Accelerometer by Adjusting Spring Constant and Hole Size of Perforated Proof-mass

Author

Japanese:	山田虎人, 向出千隼, 栗岡智行, 町田克之, Chang Tso-Fu Mark, 陳君怡, 三宅美博, 曽根正人, 伊藤浩之.
English:	Torauto Yamada, Chihaya Mukaide, Tomoyuki Kurioka, Katsuyuki Machida, Tso-Fu Mark Chang, Chun-Yi Chen, Yoshihiro Miyake, Masato Sone, Hiroyuki Ito.

Language

English

Journal/Book name

Japanese:
English:	APCOT 2026

Volume, Number, Page

Published date

June 21, 2026

Publisher

Japanese:
English:

Conference name

Japanese:
English:	APCOT 2026

Conference site

Japanese:
English: