A Highly Sensitive Single-Axis Gold MEMS Capacitive Accelerometer Improved with Spring and Proof-Mass Structures

Publication Information

Title

Japanese:
English:	A Highly Sensitive Single-Axis Gold MEMS Capacitive Accelerometer Improved with Spring and Proof-Mass Structures

Author

Japanese:	山田虎人, 向出千隼, 高畑寿志, 栗岡智行, 町田克之, Chang Tso-Fu Mark, 三宅美博, 曽根正人, 伊藤浩之.
English:	Torauto Yamada, Chihaya Mukaide, Hisashi Takahata, Tomoyuki Kurioka, Katsuyuki Machida, Tso-Fu Mark Chang, Yoshihiro Miyake, Masato Sone, Hiroyuki Ito.

Language

English

Journal/Book name

Japanese:
English:	IEEE INERTIAL 2026, The 13th IEEE International Symposium on Inertial Sensors & Systems

Volume, Number, Page

Published date

May 10, 2026

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IEEE INERTIAL 2026, The 13th IEEE International Symposium on Inertial Sensors & Systems

Conference site

Japanese:
English:	Florida