【IMPORTANT】T2R2 and STAR Search: Service Discontinuation and Successor Systems Japanese

Home > Help Publication Information Title Japanese: 高感度静電容量型 MEMS 加速度センサのための九十九折ばね解析モデルの提案  English:   Author Japanese: 高畑 寿志, 栗岡 智行, 彦坂 元, 山田 虎人, 向出 千隼, 町田 克之, Chun-Yi Chen, Tso-Fu Mark Chang, 三宅 美博, 伊藤 浩之, 曽根 正人.   English: Hisashi Takahata, Tomoyuki Kurioka, Gen Hikosaka, Torauto Yamada, Chihaya Mukaide, Katsuyuki Machida, Chun Yi Chen, Tso-Fu Mark Chang, Yoshihiro Miyake, Hiroyuki Ito, Masato Sone.   Language Japanese  Journal/Book name Japanese:   English:   Volume, Number, Page         Published date July 2026  Publisher Japanese:   English:   Conference name Japanese: 第17 回集積化ＭＥＭＳ技術研究ワークショップ  English:   Conference site Japanese:   English:

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