Home >

news Help

Publication Information


Title
Japanese: 
English:Analytical Modeling of Serpentine Spring for Gold Proof-mass Single-axis MEMS Accelerometer 
Author
Japanese: 高畑 寿志, 栗岡 智行, 山田 虎人, 向出 千隼, 町田 克之, Chang Tso-Fu Mark, 陳 君怡, 三宅 美博, 伊藤 浩之, 曽根 正人.  
English: Hisashi Takahata, Tomoyuki Kurioka, Torauto Yamada, Chihaya Mukaide, Katsuyuki Machida, Chang Tso-Fu Mark, Chen Chun-Yi, Yoshihiro Miyake, Hiroyuki Ito, Masato Sone.  
Language English 
Journal/Book name
Japanese: 
English:APCOT 2026 
Volume, Number, Page        
Published date June 21, 2026 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:APCOT 2026 
Conference site
Japanese: 
English: 

©2007 Institute of Science Tokyo All rights reserved.