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Title
Japanese:円形金錘1軸静電容量型MEMS加速度センサの構造とデバイス特性評価 
English: 
Author
Japanese: 奥村 雅子, 栗岡 智行, 山田 虎人, 森 達彦, 向出 千隼, Chen Chun-Yi, Chang Tso-Fu Mark, 三宅 美博, 伊藤 浩之, 町田 克之, 曽根 正人.  
English: Masako Okumura, Tomoyuki Kurioka, Torauto Yamada, Tatsuhiko Mori, Chihaya Mukaide, Chun Yi Chen, Tso-Fu Mark Chang, Yoshihiro Miyake, Hiroyuki Ito, Katsuyuki Machida, Masato Sone.  
Language Japanese 
Journal/Book name
Japanese:第73回応用物理学会春季学術講演会 
English: 
Volume, Number, Page        
Published date Mar. 17, 2026 
Publisher
Japanese: 
English: 
Conference name
Japanese:第73回応用物理学会春季学術講演会 
English: 
Conference site
Japanese: 
English: 

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