Detection Characteristics in Wide Range Gold Proof-Mass Single-Axis MEMS Capacitive Accelerometer and Its Application

Publication Information

Title

Japanese:
English:	Detection Characteristics in Wide Range Gold Proof-Mass Single-Axis MEMS Capacitive Accelerometer and Its Application

Author

Japanese:	向出千隼, 山田虎人, 栗岡智行, 町田克之, 陳君怡, Chang Tso-Fu Mark, 三宅美博, 曽根正人, 伊藤浩之.
English:	Chihaya Mukaide, Torauto Yamada, Tomoyuki Kurioka, Katsuyuki Machida, Chun-Yi Chen, Tso-Fu Mark Chang, Yoshihiro Miyake, Masato Sone, Hiroyuki Ito.

Language

English

Journal/Book name

Japanese:
English:	APCOT 2026

Volume, Number, Page

Published date

June 21, 2026

Publisher

Japanese:
English:

Conference name

Japanese:
English:	APCOT 2026

Conference site

Japanese:
English: