Geometric Effects on the Mechanical Characteristics of Ti/Au Multi-layered Serpentine Springs toward MEMS Applications

Publication Information

Title

Japanese:
English:	Geometric Effects on the Mechanical Characteristics of Ti/Au Multi-layered Serpentine Springs toward MEMS Applications

Author

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 21, 2026

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 52nd International Conference on Micro and Nano Engineering (MNE2026 Interlaken)

Conference site

Japanese:
English:	Interlaken