Annealing effects on effective Young’s modulus of Ti/Au multi-layered microcantilevers

Publication Information

Title

Japanese:	Annealing effects on effective Young’s modulus of Ti/Au multi-layered microcantilevers
English:	Annealing effects on effective Young’s modulus of Ti/Au multi-layered microcantilevers

Author

Japanese:	Tatsuhiko Mori, Tomoyuki Kurioka, Shunkai Watanabe, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.
English:	Tatsuhiko Mori, Tomoyuki Kurioka, Shunkai Watanabe, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.

Language

English

Journal/Book name

Japanese:	Micro and Nano Engineering
English:	Micro and Nano Engineering

Volume, Number, Page

Vol. 32 pp. 100367-100367

Published date

June 8, 2026

Publisher

Japanese:
English:

Conference name

Japanese:
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Conference site

Japanese:
English:

Official URL

DOI