Scalable ferroelectricity of 20-nm-thick (Al0.8Sc0.2)N thin films sandwiched between TiN electrodes

Publication Information

Title

Japanese:
English:	Scalable ferroelectricity of 20-nm-thick (Al0.8Sc0.2)N thin films sandwiched between TiN electrodes

Author

Japanese:	大田怜佳, 安岡慎之介, 水谷涼一, 白石貴久, 岡本一輝, 角嶋邦之, Tomoyuki Koganezawa, 坂田修身, 舟窪浩.
English:	Reika Ota, Shinnosuke Yasuoka, Ryoichi Mizutani, Takahisa Shiraishi, Kazuki Okamoto, Kuniyuki Kakushima, Tomoyuki Koganezawa, Osami Sakata, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	J. Appl. Phys.

Volume, Number, Page

vol. 134 pp. 214103-1-6

Published date

Dec. 4, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: