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Publication Information
Title
Japanese:
English:
Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing
Author
Japanese:
TENNETI DEVI
,
御宿 希祐
,
向出 千隼
,
山田 虎人
,
町田 克之
,
栗岡 智行
,
Chang Tso-Fu Mark
,
曽根 正人
,
三宅 美博
,
伊藤 浩之
.
English:
Devi Srujana Tenneti
,
Kisuke Miyado
,
Chihaya Mukaide
,
Torauto Yamada
,
Katsuyuki Machida
,
Tomoyuki Kurioka
,
Tso-Fu Mark Chang
,
Masato Sone
,
Yoshihiro Miyake
,
Hiroyuki Ito
.
Language
English
Journal/Book name
Japanese:
English:
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)
Volume, Number, Page
Published date
Sept. 16, 2024
Publisher
Japanese:
English:
Conference name
Japanese:
English:
50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.