Characterization of Ferroelectric Switching Properties for (Al,Sc)N Films with Various Composition

Publication Information

Title

Japanese:
English:	Characterization of Ferroelectric Switching Properties for (Al,Sc)N Films with Various Composition

Author

Japanese:	安岡慎之介, 岡本一輝, 清水荘雄, 舟窪浩.
English:	Shinnosuke Yasuoka, Kazuki Okamoto, Takao Shimizu, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 26, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2023 MRS Fall Meeting & Exhibit

Conference site

Japanese:
English:	Boston