(Al,Sc)N強誘電体薄膜におけるスイッチング特性の結晶構造依存性

Publication Information

Title

Japanese:	(Al,Sc)N強誘電体薄膜におけるスイッチング特性の結晶構造依存性
English:

Author

Japanese:	河野駿平, 岡本一輝, 影山壮太郎, 孫納納, 安岡慎之介, 舟窪浩.
English:	Shumpei Kawano, Kazuki Okamoto, Sotaro Kageyama, 孫納納, Shinnosuke Yasuoka, HIROSHI FUNAKUBO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 14, 2025

Publisher

Japanese:
English:

Conference name

Japanese:	第72回応用物理学会春季学術講演会
English:

Conference site

Japanese:	千葉県野田市
English: