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Title
Japanese:低気圧アルゴンプラズマの空間平均分光計測と局所電子温度・密度との関係 
English:Spatially averaged spectroscopic measurements of low-pressure argon plasmas and their relationship to local electron temperature and density 
Author
Japanese: 福本 晃己, 土居 謙太, 清田 哲司, 山下 雄也, 菊地 航行, 根津 篤, 赤塚 洋.  
English: Koki Fukumoto, Kenta Doi, Tetsuji Kiyota, Yuya Yamashita, Wataru Kikuchi, Atsushi Nezu, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:第86回応用物理学会秋季学術講演会 講演予稿集 
English:Extended Abstracts of the 86th JSAP Autumn Meeting 2025 
Volume, Number, Page         08-112
Published date Aug. 26, 2025 
Publisher
Japanese:公益社団法人 応用物理学会 
English:Japan Society of Applied Physics 
Conference name
Japanese:第86回応用物理学会秋季学術講演会 
English:The 86th JSAP Autumn Meeting 2025 
Conference site
Japanese:名古屋 
English:Nagoya 
Official URL https://pub.confit.atlas.jp/ja/event/jsap2025a/presentation/10a-N323-5
 
Abstract This study investigates the diagnostic accuracy of electron temperature and density in low-pressure argon plasmas by comparing line-of-sight averaged spectroscopy with spatially resolved measurements using tomographic analysis. A collisional-radiative model incorporating 65 energy levels was applied to extract local plasma parameters. Using optical fibers arranged around the plasma chamber, emission data were collected and reconstructed through algebraic reconstruction techniques. Results show that tomographic methods capture spatial non-uniformities, while line-averaged methods tend to overestimate values, especially at chamber edges. This highlights the limitations of conventional spectroscopy and the advantages of tomographic diagnostics.

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