Evaluation of the Annealing Induced Warpage of an Electrodeposited-Au Octagonal Proof Mass with a Ti/Au Multi-layered Structure toward MEMS Capacitive Accelerometers

Publication Information

Title

Japanese:
English:	Evaluation of the Annealing Induced Warpage of an Electrodeposited-Au Octagonal Proof Mass with a Ti/Au Multi-layered Structure toward MEMS Capacitive Accelerometers

Author

Japanese:	森達彦, 栗岡智行, 陳君怡, Chang Tso-Fu Mark, 町田克之, 伊藤浩之, 三宅美博, 曽根正人.
English:	Tatsuhiko Mori, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Miyake, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	Journal of The Electrochemical Society

Volume, Number, Page

Published date

Oct. 10, 2025

Publisher

Japanese:
English:

Conference name

Japanese:
English:

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Japanese:
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DOI