High Speed MEMS Scanning Mirror with Vertical Comb Drives

論文・著書情報

タイトル

和文:
英文:	High Speed MEMS Scanning Mirror with Vertical Comb Drives

著者

和文:	和田裕之, Daesung Lee, Kyoungsik Yu, Uma Krishnamoorthy, Stefan Zappe, Olav Solgaard.
英文:	Hiroyuki Wada, Daesung Lee, Kyoungsik Yu, Uma Krishnamoorthy, Stefan Zappe, Olav Solgaard.

言語

English

掲載誌/書名

和文:
英文:	3rd International Conference on Optics-photonics Design & Fabrication

巻, 号, ページ

pp. 29-30

出版年月

2002年10月

出版者

和文:
英文:

会議名称

和文:
英文:	3rd International Conference on Optics-photonics Design & Fabrication

開催地

和文:
英文: