The purpose of this study is the development of the valve that can precisely control pneumatic cylinders. The valve that has a lightweight and simple structure and uses piezoelectric oscillator which is driven at resonance mode and it can control flow rate by controlling the amplitude of the particles excitation. We reported this flow control valve principle in the previous paper and concluded the diameter of orifice is an important parameter for flow rate change. In this report, we have designed a new prototype for the purpose of high controllability. We have measured flow rate characteristics and observed particle motion. From these result, we confirmed the conditions necessary for continuous adjustment of flow quantity by experiment.
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