Chemically tailored block copolymers for highly reliable sub-10-nm patterns by directed self-assembly

論文・著書情報

タイトル

和文:	Chemically tailored block copolymers for highly reliable sub-10-nm patterns by directed self-assembly
英文:	Chemically tailored block copolymers for highly reliable sub-10-nm patterns by directed self-assembly

著者

和文:	Shinsuke Maekawa, Takehiro Seshimo, Takahiro Dazai, Kazufumi Sato, 畠山歓, Yuta Nabae, Teruaki Hayakawa.
英文:	Shinsuke Maekawa, Takehiro Seshimo, Takahiro Dazai, Kazufumi Sato, Kan Hatakeyama, Yuta Nabae, Teruaki Hayakawa.

言語

English

掲載誌/書名

和文:	Nature Communications
英文:	Nature Communications

巻, 号, ページ

Vol. 15 No. 1 pp. 5671

出版年月

2024年7月

出版者

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英文:

会議名称

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開催地

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公式リンク

DOI